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Chemical Vapor Deposition for Microelectronics
1987 · Book · Arthur Sherman
Design and constructionIntegrated circuitsVapor-platingMicroelectronicsVaporsChemical vapor deposition
“Chemical vapor deposition (CVD) is a process where one or more gaseous species react on a solid surface and one of the reaction products is a solid phase material.”
by Arthur Sherman
- Author
- Arthur Sherman
- Publisher
- Noyes Publications
- Pages
- 215
- Editions
- 2
- Series
- Materials science and process technology series